Fabrication of h-BN powder by chemical vapor deposition
Details
Hexagonal boron nitride (h-BN) powders have been fabricated by a chemical vapor method aiming at its application for the UV phosphors. The purposes of this study are the optimization of synthesis conditions and the characterization of luminescence properties of h-BN. The dependence of synthesis conditions on the powder properties has been examined by changing mainly flow rates of gases with a reaction temperature kept at 1800℃ during synthesis. The X-ray diffraction measurement has revealed that the samples include amorphous or the other unknown phase. On the other hand, the sample showing the band edge emission in the wavelength region of 215〜240nm has been fabricated although the cathodoluminescence spectrum is dominated by the impurity-related band in 300〜350nm.
