2-10 X線および真空紫外線照射を用いたMEMS振動発電器用エレクトレット荷電法(第2部門 情報ディスプレイ,マルチメディアストレージ,コンシューマエレクトロニクス,情報センシング)

萩原 啓; 鈴木 雄二

doi:10.11485/itewac.2011.0_2_10

PROCEEDINGS OF THE ITE WINTER ANNUAL CONVENTION

Online ISSN : 2424-2306
Print ISSN : 1343-4357
ISSN-L : 1343-4357

2011

Session ID : 2-10

DOI https://doi.org/10.11485/itewac.2011.0_2_10

Conference information

Name : 2011 ITE Winter Annual Convention

Location : [in Japanese]

Date : December 21, 2011 - December 22, 2011

2-10 Electret charging method using X-ray and Vacuum UV irradiation for MEMS Electret Power Generator

Kei HAGIWARA, Yuji SUZUKI

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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

We examined the charging characteristics of electrets using X-rays and vacuum UV irradiation for MEMS power generator. Surface potential increases as X-ray irradiation time and the charging rate varies for introduced gas species. VUV can form electrets within 2 sec due to the generation of large amount of ions/electrons.

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