Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1414
13
Session ID : PB7
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PB7 Properties of ZnO piezoelectric films deposited by an RF mode ECR sputtering system
Michio Kadota, Toru Kasanami, Makoto Minakata
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© 1992 Institute for Ultrasonic Elecronics
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