Proceedings of Symposium on Ultrasonic Electronics
Online ISSN : 2433-1414
13
Session ID : PB8
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PB8 Application of the Ion Beam Sputtered Al Films to Ultra-thin SAW Devices
Atsushi KAMIJO, Tsutomu MITSUZUKA, Yasushi YAMAMOTO, Kaoru TOMOTSUNE, Shigeru TAMICHI
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© 1992 Institute for Ultrasonic Elecronics
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