Proceedings of the Japan Joint Automatic Control Conference
THE 53RD JAPAN JOINT AUTOMATIC CONTROL CONFERENCE
Session ID : 319
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Dynamical Control Systems Design
Modeling and Control of Active Isolation system with elastic load by using the reduced order physical model
*Koji OkamotoKeisuke SudoToru WatanabeKazuto SetoHiroyuki Tanaka
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
This paper deals with the control system design for active isolation table. It aims at controlling vibration of the installed object and isolation table. An experimental isolation table with flexible loaded object is built. Control simulations are carried out by using feedback controller designed according to LQ control theory.
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© 2010 JSME
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