Realization and Application of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

Mohebullah Wali; Yukinori Nakamura; Shinji Wakui

doi:10.11511/jacc.53.0.168.0

THE 53RD JAPAN JOINT AUTOMATIC CONTROL CONFERENCE

Session ID : 401

DOI https://doi.org/10.11511/jacc.53.0.168.0

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Host: The Japan Society of Mechanical Engineers, The Society of Instrument and Control Engineers, The Institute of Systems, Control and Information Engineers, The Society of Chemical Engineers, Japan, The Japan Society for Precision Engineering, The Japan Society for Aeronautical and Space Sciences

Co-host: Technically Cosponsored by 50 Societies and Institutes

Mechanical Control 1

Realization and Application of the Base Plate Jerk Feedback in a Pneumatic Positioning Stage

*Mohebullah Wali, Yukinori Nakamura, Shinji Wakui

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Keywords: Pneumatic Positioning Stage, Base Plate, Acceleration, Jerk Feedback, Coil-Type Spring Isolator, Perfect Integrator, PDD2 Compensator

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Abstract

In this study a pneumatic positioning stage is considered, which is mounted on the base plate. The base plate is supported by the coil-type spring isolators. The stage is moved by the driving force and the reaction force causes the vibration of the base plate with its natural frequency, affecting the stage to fluctuate in the opposite direction, which degrades the performance of positioning. To reduce the effect of the reaction force and improve the positioning time, the base plate jerk feedback is proposed. This feedback was first realized using an external force exerted to the base plate and then employed for the real condition of positioning. In both cases good experimental results were obtained, which are explained in the remainder of this literature.

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