Proceedings of the Japan Joint Automatic Control Conference
THE 53RD JAPAN JOINT AUTOMATIC CONTROL CONFERENCE
Session ID : 526
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Vibration Control
Implementation of Flow Disturbance Observer for Air Spring Type Anti-Vibration Apparatus
*Ryo FukudaYukinori NakamuraShinji Wakui
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
On the site of industry, flow disturbance happens frequently. It was previously proved that swing of isolated table is canceled by using the feedforward control. However, the feedforward control is required the pressure sensor, and then the cost is required for arrange the pressure sensor. To overcome the problem, the vibration of isolated table is restrained with disturbance observer.
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© 2010 JSME
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