Proceedings of the Japan Joint Automatic Control Conference
THE 54TH JAPAN JOINT AUTOMATIC CONTROL CONFERENCE
Session ID : 1B304
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Theory and Appication on System and Control (4: Vibration, Acoustic and Motion Control)
A Research on Isolation and Positioning Performance of Active Isolation System
*Hirokazu YoshiokaHitoshi MatsushitaYoshinori Takahashi
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CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract
By the previous researches on an active isolation system, vibration isolation performance has been most important issue. In this study, positioning performance of the isolation table is another important point as well as isolation performance. Formulation of an analysis model of the isolation system considering positioning control system is conducted. Design technique of the control system for both feed-back controller and positioning controller is shown.
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© 2012 SICE
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