2018 年 12 巻 1 号 p. JAMDSM0032
The galvano mirror has been widely used in the field of laser processing. It has a variety of vibration modes which are due to the torsion of the motor and the elastic deformation of the mirror. To improve the mechanical structure and to identify the resonance causes, the model of the galvano mirror is constructed. Moreover, the lumped mass system model is parametrical considered to verify the relationship between each resonance frequency and the component of the galvano mirror. The galvano mirror is composed of the motor, the coupling, and the mirror. Then, the models of each part are separately constructed and finally connected to build the model of the galvano mirror. In detail, the motor model is constructed based on the torsion of the motor itself. The mirror model which is regarded as the elastic structure is constructed based on the reduced order model. The galvano mirror model includes the pitching vibration mode which is not able to be actually detected by encoder. Any parameters of the model which are able to be used for future improvements from the mechanical point of view are changed to verify the rate of change against each resonance. In addition, the coupling rigidity is changed to shift the resonances to high frequency region through various approaches and to verify the propriety of the model.
