2021 年 15 巻 3 号 p. JAMDSM0032
Integrated circuits industry is inherently linked to the national economy development and the security national defense in China. Its product quality and productivity as bottleneck resolutions are crucially depended on the performance of microelectronic equipment motion platform. However, motion platforms face a series of requirements including high-acceleration, ultra-precision positioning and so on. These requirements can be theoretically addressed by a typical macro-micro driving concept platform. Therefore, kinds of motion platform are proposed and Implemented. In the process of exploring analysis of macro-micro motion platform, especially for some key structures such as link frames, flexible hinge mechanisms, etc., many effective multiphysics coupling optimization methods are proposed to obtain superior performance of platform. Meanwhile, the vibration suppression of macro-micro motion platform is described to ensure ultra-precise positioning. At last, the development trends and facing problems of macro-micro motion platform are suggested. This review will promote the upgrading of microelectronics manufacturing equipment and accelerate the rapid development of microelectronics manufacturing industry.
