Precision in the Mechanical Removal Processing of a Nanosheet by AFM Probe

— Study of the Processing Method for Fabrication of High Precision Grooves —

抄録

This paper presents nano mechanical removal processing of a potassium niobate nanosheet with an atomic force microscope (AFM). In particular, we examined the control processing method for the direction of the nanosheet surface in order to attain a high precision groove machining of a bilayer nanosheet. As a result, by the machining direction taking into account machining anisotropy and the machining load W that balance machining accuracy and machining stability, a machined groove with a maximum width of 28nm and a very sharp edge of a bilayer nanosheet was attained.