抄録
Recently, micro holes processing on glass were focused on chemical and biological filed. Authors focused on Electro-Chemical Discharge Machining (ECDM) to machine micro holes on glass, and developed the ECDM device. This paper reports about feedback circuit for machining-stop system and two-step machining which were developed to reduce the smallest diameter of micro hole. Additionally, the tool electrode of which diameter was 20 µm was produced using Electro-Chemical Machining (ECM). As a result, the diameter of micro hole was reached to 12 µm.
