2012 年 6 巻 7 号 p. 1154-1167
As the core part of the electro-hydraulic servo system, the electro-hydraulic servo valve plays an important role in the system. Due to the piezoelectric actuator has characteristics of fast response, easy control and high control accuracy, it can be used as the electric-mechanical converter of the electro-hydraulic servo valve. However, this kind of the piezoelectric direct drive electro-hydraulic servo valve has hysteresis and creep nonlinearities. In order to improve the output accuracy of the system, a high-precise fuzzy control method with the dynamic Preisach model in feedforward loop is proposed. The control scheme is separated into two parts: a feedforward loop with the dynamic Preisach model and a feedback loop with high precise fuzzy control. The high precision fuzzy control adopts Lagrange interpolation method. The experimental results show that the proposed method can resolve the hysteresis and creep nonlinearities and reach a higher dynamic performance, the control effect is better than the conventional fuzzy control method.