Abstract
The evaporation-reaction type aerosol generator of ultrafine tin oxide particles is developed, and the effect of the evaporating temperature on particle size distributions and number concentrations of generated ultrafine tin oxide particles is studied. Particles generated are introduced at high velocity into a deposition chamber pumped down to about 4000 Pa, and are deposited on a glass substrate by inertia to make a thin film. The electrical characteristics of the film thus made are evaluated. The conductance of the film increases with the decrease of film thickness and with the increase of the substrate temperature. The current -voltage relation of the film is Ohmic. It is shown that the ultrafine tin oxide particle film can selectively detect H2, N2 and O2 gases and is most sensitive to H2 gas.
