Earozoru Kenkyu
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
Feature Articles —Aerosol Technology for Contamination Control in Micro-Electronics—
Measurement of Generated Particles in Semiconductor Manufacturing Apparatus
Kaoru KONDO
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Keywords: Particle, Particle Counter, Particle Generation, Semiconductor, TFT, CVD
JOURNAL FREE ACCESS

1996 Volume 11 Issue 1 Pages 16-21

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© 1996 Japan Association of Aerosol Science and Technology
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