高周波振動気流による表面付着粒子の除去

抄録

Removal of deposited single particles by use of a vibrating air jet has been studied experimentally, with particular attention to the effect of operating conditions. Two types of nozzle were newly designed and 6 sorts of metal plates were used as a vibrating plate. Twelve combinations of the nozzle and the vibrating plate have been tested to get the best combination for the generation of a high frequency vibration. Experimental results showed that the removal efficiency is almost determined by the vibration characteristics rather than air jet velocity. When the nozzle pressure is set at 2.5×10⁵ Pa or 3.0×10⁵ Pa, the removal efficiency tends to increase with the frequency of the vibration at the surface. In this case, longer jet duration time enhances the efficiency. Then, the number of repetition of pressure pulsation is one of the main cause of the effects of vibration. On the other hand, when the pressure is set at 3.5×10⁵ Pa, the removal efficiency is affected by the shape of the vibrating wave.