Morphology and Electric Characteristic of Conductive Zinc Oxide Fine Particles Generated by Aerosol Process

Abstract

White colored and highly conductive (electric resistivity ∼10 Ωcm) fine particle of aluminum doped zinc oxide is generated by gas phase reaction of zinc vapor, aluminum acetate vapor and oxygen. The morphology and crystal structure of generated particles is measured by electron microscopies and x-ray diffraction. From experimental results, it is found that the chemical stoiochiometry of zinc, aluminum and oxygen, (Zn : Al : O), is important parameter to control both particle morphology (size, shape and color) and electric characteristic. It is also found that the resistivity of produced particles decrease with water vapor addition, since water vapor may assist decomposition of aluminum acetate.