Abstract
Allocation method of contaminant source in a cleanroom was developed. With this method, the distribution of contaminant concentration was given as a weighted sum of influences from each contaminant source. The weighting function of each contaminant source was obtained by treating it as a linear inversion-problem. Generalized inverse matrix technique was employed to solve the problem. As a result, the contribution of each contaminant source was determined, and therefore the result was useful to improve the cleanliness level of cleanrooms. The method was further improved to solve unsteady state problems. The improved method gave a good agreement in the locations with previously assumed sources, and it was found that the method was applicable to the continuous monitoring of cleanrooms.
