Abstract
DSMC (Direct Simulation Monte Carlo) technique is a direct approach to solve the Boltzmann equation. To simulate small scale phenomena of gas mixture close to molecular size, such as behavior of nano-particles, particle formation from gas, etc., DSMC technique was extended to the rarefied gas mixture. This advanced technique was applied to the fundamental problems, such as Rayleigh’s problem, velocity distribution of gas molecules in equilibrium gas mixture, and time-dependent change of distribution of diffused gas molecules. Simulated results using DSMC technique extended to gas mixture showed a good agreement with theories and previous studies. Also, characteristics of Bird-scheme and Nanbu-scheme which have been widely applied to treat collisions between molecules in DSMC method were studied. Finally, a practical problem, the deposition of sputtered molecule, was simulated, and this technique was proved to be a powerful tool for solving this sort of problems.
