Energy-Saving Method of Humidification System for Cleanroom Using One Fluid Type Spray Nozzles

Abstract

In cleanrooms where micro devices such as LSIs and FPDs are manufactured, the energy saving has been demanded to reduce the operation cost and the environmental burden. The air conditioning system for cleanrooms is normally divided into an indoor system and outdoor air system. In winter, the indoor system is operated in the cooling mode while the outdoor air system is operated in the heating mode, and thus both heat and cold sources run simultaneously causing heat loss and uneconomical running of the facilities. In order to resolve this problem, we proposed a humidification system with one-fluid type spray nozzles. This humidification system can reduce CO₂ emissions by over 15% for the cleanroom where an exhaust heat recovery equipment has been already introduced.