Earozoru Kenkyu
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
Feature Articles —Clean Room I—
Deposition of Aerosol Particles on Solid Surfaces
Manabu SHIMADA, Yasuo KOUSAKA
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Keywords: Particle Deposition, Solid Surface, Brownian Diffusion, Clean Room, Wafer, Electrostatic Force, Flow Field
JOURNAL FREE ACCESS

1988 Volume 3 Issue 4 Pages 273-282

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© 1988 Japan Association of Aerosol Science and Technology
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