Earozoru Kenkyu
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
Feature Articles —Clean Room II—
Control of Airborne Dust Generated from Materials, Garments and Process Equipments in Clean Room
Nobuyoshi HATTORI, Takaaki FUKUMOTO
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Keywords: Semiconductor, Clean Room, Particle Dispersion, Particle Deposition, Wafer, Yield
JOURNAL FREE ACCESS

1989 Volume 4 Issue 2 Pages 103-108

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© 1989 Japan Association of Aerosol Science and Technology
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