Earozoru Kenkyu
Online ISSN : 1881-543X
Print ISSN : 0912-2834
ISSN-L : 0912-2834
Feature Articles —Clean Room II—
Problems on Particle Contamination in Semiconductor Industry
Michio SUZUKI
Author information
Keywords: Clean Room, Particle Contamination, Processing Machine, LSI Processing, Air Flow Pattern, Electrostatic Deposition
JOURNAL FREE ACCESS

1989 Volume 4 Issue 2 Pages 88-94

Details
Download PDF (687K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Article 1st page
Content from these authors
© 1989 Japan Association of Aerosol Science and Technology
Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top