イオナイザ用セラミックスエミッタ

抄録

In this report, we deal with a new type ceramics emitter which is composed of a silicon edge and a silicon carbide ceramics rod. The electrical, mechanical, and chemical characteristics at the interface between silicon and silicon carbide ceramics were investigated. These characteristics had no problem for practical use as an emitter. The discharge tests were carried out for the ceramics emitter, the tungsten emitter, and the titanium emitter with A.C. 7000V ionizer for 100hrs. After the discharge tests, these emitters were observed by a scanning electron microscope. The tungsten emitter showed a remarkable degradation. The titanium emitter changed into a crater like surface. However, the ceramics emitter did not show any change on the surface condition. The smallest curvature emitter generated the highest density of ions, and showed a remarkable degradation.