セラミックスエミッタの発塵と劣化のメカニズム

抄録

We deal with a new type ceramics emitter which is composed of a needle-shaped poly-silicon and a silicon carbide ceramic rod for an ionizer used in a semiconductor manufacturing clean room. The ion density measurement, the particle generation test, and the degradation test were carried out for the ceramics emitter comparing with the conventional tungsten emitter and the titanium emitter. After the discharge tests, the oxygen concentration near the surface were analyzed using an Auger electron spectroscopy. In the ion density tests, significant differences could not be found among these emitters. The ceramics emitter shows the smallest particle generation and degradation. The oxide films were formed on each emitter surface. It is considered that the oxide film plays an important role to generate the particle from the emitters.