日本マイクログラビティ応用学会誌
Print ISSN : 0915-3616
閉鎖系容器を利用した宇宙での CVD ダイヤモンド合成実験の可能性
田辺 靖博海川 和之澤岡 昭高木 喜樹
著者情報
ジャーナル オープンアクセス

1994 年 11 巻 2 号 p. 71-

詳細
抄録
Diamonds synthesis by a hot filament CVD (Chemical Vapor Deposition) method in a closed sys­tem was carried out as a pre-study under micro gravity. A gas mixture of 1.5 vol % ethanol and H2 was used for the starting gas. Temperature measurement and gas analysis by gas chromatograph in the chamber during the synthesis were carried out. Temperature profile and flow velocity in the chamber under micro gravity (5 X 10- 3 g) and normal one (1 g) were simulated with a numerical code. In the chamber used in this study (100 mm in diameter and 100 mm in height) quality of the synthesized diamonds became lower after 15 minutes in reaction, because oxygen radicals/ atoms might be consumed at that time. It was suggested by the calculation that the amount of atomic hydro­gen near the substrate (the distance was 1 to 5 mm from the filament) under micro gravity was smaller by 1/100 than that under the normal one.
著者関連情報
© 1994 日本マイクログラビティ応用学会
前の記事 次の記事
feedback
Top