日本マイクログラビティ応用学会誌
Print ISSN : 0915-3616
シアーセル法によるゲルマニュウム半導体融液の高精度拡散係数測定技術の開発
依田 真一織田 裕久中村 富久正木 匡彦越川 尚清松本 聡丹治 彰兼子 稔荒井 義人後藤 一将立岩 夏美
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ジャーナル オープンアクセス

1997 年 14 巻 4 号 p. 331-

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Shear Cell method is one of diffusion coefficient measuring method, and this method can make it possible to measure Diffusion coefficient accurately. Development of Shear Cell method was performed in this investigation. Preliminary investigation as fluid simulation was performed to decide best design for Shear Cell cartridge. Diffusion coefficient of germanium semiconductor melt was measured in microgravity environment using this Shear Cell cartridge. Experiment temperature is 1200°C, experiment time is 357 sec. These experiment conditions are decided to utilize microgravity environment in sounding rocket fully. Concentration distribution of experiment sample is measured by SIMS after flight experiment. Diffusion coefficient is calculated as 1.94 X 10-4 cm2 / s from this results. Technological development of Shear Cell method was achieved from this experiment.
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© 1997 日本マイクログラビティ応用学会
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