Abstract
It is important to reveal the ion truck structure of high energy charged particles for the field of engineering and medicine. We have developed a 3D Monte Carlo code and selected an inorganic scintillator CsI as target. So we calculate the elastic scattering of ion and electron in terms of the theory of relativity to make scattered electron angle calculation in 3D Monte Carlo code. We calculated the spatial distribution of energy by secondary electrons when H and He ions are incident. We compare the result from our 3D Monte Carlo code with a macroscopic model. We confirm large fluctuation of energy deposition from our calculation.