Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2009 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 12-2A-04
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Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

Development of low electron temperature plasma source for adhesive water-repellent thin film preparation
Kiyoharu Kihara, Yasunori Otsu, Tatsuya Misawa
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[in Japanese]
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© 2009 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
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