Record of Joint Conference of Electrical and Electronics Engineers in Kyushu
Record of 2009 Joint Conference of Electrical and Electronics Engineers in Kyushu
Session ID : 12-2A-05
Conference information

Host: Joint Conference of Electrical and Electronics Engineers in Kyushu

In-situ Monitoring of Deposition Process of Diamond-like Carbon Thin Films by Optical Reflectance Interferometry
Kazuishi Uehara, Masanori shinohara, Yoshinobu Matsuda
Author information
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download PDF (217K)
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2009 Committee of Joint Conference of Electrical and Electronics Engineers in Kyushu
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top