抄録
The cross-sectional and axial velocity profiles and temperature distributions in a horizontal epitaxial reactor were calculated numerically from fundamental equations under certain assumptions. Streamlines in the cross-section showed similar pattern over the whole range of Gr, but the value of stream function was affected by Gr. The axial velocity profiles were quite different from that of parabolic flow when Gr was larger than 104. The temperature distributions in a cross-section of the channel became uniform when Gr was large.
In order to check the calculated results, the axial velocity profile and the temperature distribution were measured in this reactor under the same conditions as those of this calculation. The calculated velocity and temperature were a good approximation of the experimental ones.