抄録
The temperature distributions and concentration distributions of reactant gas in a horizontal epitaxial reactor were investigated experimentally and theoretically in the high flow rate range, that is, Q= 10-60 l/min (20°C, 1 atm, Re=160-1400). The temperature and concentration distributions in the reactor in the case of no axial temperature gradient in the high flow rate range were between the calculated distributions for spiral flow and the calculated distributions for axial flow with no cross-sectional flow. When the flow rate is less than 20 l/min, the temperature and concentration distributions are approximately calculated by the fundamental equations in the case of stable spiral flow. However, when the flow rate is larger than 50 l/min, these distributions are approximately calculated by the fundamental equations in the case of axial flow with no cross-sectional flow. An empirical equation for the estimation of gas temperature distributions in the high flow rate range was obtained.
