Grain Orientation in Barium Titanate Thin films Obtained by a Modified Doctor-Blade Method

Abstract

Pure barium titanate thin films of 20μm to 120μm thick were obtaind by a modified doctor-blade method. The films were sintered at 1300, 1350 or 1400°C for 2h in air. The films sintered at 1350 or 1400°C were mostly composed of a grain in the direction perpendicular to the surface. As to about 40μm thick films, the percentage of the area where the grain size in the direction parallel to the surface was more than two times as long as the film thickness was 0% for 1300°C, 9% for 1350°C and 25% for 1400°C respectively.
X-ray diffraction patterns indicated that c-axis of the grains had a tendency to orientate preferentially in the direction perpendicular to the film surface. On the films of the same thickness, the degree of the preferred orientation increased with the increase of the sintering temperature, while on the films sintered at the same temperature, the thinner the film, the higher the degree of the preferred orientation.