Abstract
Localized corrosion and water adsorption have been studied for soda-lime-silicate glass films and silica glass films prepared by sputtering using an atomic force microscope (AFM). The in-situ AFM observation was carried out for the thin films exposed to a humidity-controlled environment. Water adsorption was distinguished from localized corrosion, based on the reversibility to humidity change, thus opening the possibility of nano-scale localized corrosion identification. Surface roughness on soda-lime-silicate glass films was increased with increasing relative humidity. On the other hand, surface roughness on silica glass films was decreased with increasing relative humidity. The localized corrosion developed in regions with extensive water adsorption for soda-lime-silicate glass films.
