2000 Volume 108 Issue 1263 Pages 998-1002
A photoreactive [Pb-Ti] precursor was successfully synthesized by chemical modification of metallo-organics with alkanolamine. The synthesized precursor showed strong absorption at wavelengths shorter than 350nm, being effective for the absorption of ultra-violet light. Photolithographic patterning of [Pb-Ti] precursor film on MgO (100) substrate could be prepared by UV-irradiation. The patterned precursor film yielded highly oriented lead titanate (PbTiO3) of perovskite single phase by rapid heating at 550°C. PbTiO3 films with a thickness of about 100nm could also be synthesized on a Pt/quartz substrate using cyclic treatments of coating/UV-irradiation. Compared with the conventional method, this synthetic method was found to be useful from the following viewpoints: (1) preparation of thicker film was possible within short time; and, (2) synthesis of PbTiO3 single phase with a uniform microstructure could be obtained.
