Abstract
Non-stoichiometric titanium nitride coating film was prepared on the SiO2 glass substrate by ammonolysis of titanium dioxide coating film applied by sol gel method. The TiO2 sol suitable for dip-coating was obtained by using diethanolamine as a stabilizing agent, when water and solvent were mixed in the molar ratio of 3:5. The TiO2 coating film thus obtained was converted to titanium nitride by heating at 1100°C under the flow of NH3 gas. The obtained titanium nitride film was fairly sensitive to air at temperatures above 400°C and gradually transformed to TiO2.
