Preparation of Tungsten Bronze Type Ferroelectric Ba0.75Y0.166Nb2O6  Thin Films by RF Magnetron Sputtering

Te-Wei CHIU; Naoki WAKIYA; Kazuo SHINOZAKI; Nobuyasu MIZUTANI

doi:10.14852/jcersjsuppl.112.0.S465.0

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue

Session ID : 6

DOI https://doi.org/10.14852/jcersjsuppl.112.0.S465.0

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Host: The Ceramic Society of Japan

Co-host: Iketani Science and Technology Foundation, International Ceramic Federation, Commemorative Organization for the Japan World Exposition '70, The American Ceramic Society, The Australasian Ceramic Society, The Chinese Ceramic Society, The Korean Ceramic Society, Joint Research Consortium of Synergy Ceramics/Fine Ceramics Research Association, Nanotechnology Researchers Network Center of Japan, The Special Coordination Funds for Promoting Science and Technology, Japan National Tourist Organization, Aichi Prefectural Government, CASIO SCIENCE PROMOTION FOUNDATION, DAIKO FOUNDATION, Nagoya Convention and Visitors Bureau, The Asahi Glass Foundation, The Kao Foundation For Arts And Sciences, The Murata Science Foundation, The Ogasawara Foundation for the Promotion of Science & Engineering, ASAHI GLASS CO., LTD. Research Center, CENTRAL GLASS CO., LTD., ELECTRIC GLASS INDUSTRY ASSOCIATION OF JAPAN (EGAJ), Hattori Company, Ltd., Hitachi Research Laboratory, Hitachi, Ltd., HOYA CORPORATION, INAX Corporation, ITOCHU CERATECH CORP., Japan Cement Association, KYOCERA Corporation, KYUSHU REFRACTORIES CO., LTD., MINO CERAMIC CO., LTD., Murata Manufacturing Co., Ltd., NGK INSULATORS LTD., NGK SPARK PLUG CO., LTD., NICHIAS Corporation, NIKKO COMPANY, Nippon Electric Glass Co., Ltd., Nippon Sheet Glass Co., Ltd., NORITAKE CO., LIMITED, Tokuyama Corporation, TOTO LTD.

Papers

Preparation of Tungsten Bronze Type Ferroelectric Ba_0.75Y_0.166Nb₂O₆ Thin Films by RF Magnetron Sputtering

Te-Wei CHIU, Naoki WAKIYA, Kazuo SHINOZAKI, Nobuyasu MIZUTANI

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Keywords: (Ba,Y)Nb₂O₆, Sputtering, Thin Films, Tungsten Bronze, Ferroelectrics

CONFERENCE PROCEEDINGS FREE ACCESS

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Abstract

Ba_0.75Y_0.166Nb₂O₆ (BYN) thin films were deposited on (100)MgO and (100)Si substrates by RF magnetron sputtering for the first time. The thin films deposited on MgO substrates show single crystalline layer with the (001) orientation perpendicular to the substrate plane confirmed by X-ray diffraction 2θ scans. However, X-ray polefigure revealed that the films have two in-plane orientations. The unit cell of BYN is rotated in the plane of the film by ±15° with respect to the unit cell of the MgO substrate. The thin films deposited on Si substrates are polycrystalline with random orientation.

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