Ferroelectric and Memory Characteristics of (Pb, La)(Zr, Ti)O3 Thin  Films Crystallized by Hot Isostatic Pressing

Shinichi KOJIMA; Masafumi KOBUNE; Yusuke NISHIOKA; Tetsuo YAZAWA

doi:10.14852/jcersjsuppl.112.0.S469.0

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue

Session ID : 6

DOI https://doi.org/10.14852/jcersjsuppl.112.0.S469.0

Conference information

Host: The Ceramic Society of Japan

Co-host: Iketani Science and Technology Foundation, International Ceramic Federation, Commemorative Organization for the Japan World Exposition '70, The American Ceramic Society, The Australasian Ceramic Society, The Chinese Ceramic Society, The Korean Ceramic Society, Joint Research Consortium of Synergy Ceramics/Fine Ceramics Research Association, Nanotechnology Researchers Network Center of Japan, The Special Coordination Funds for Promoting Science and Technology, Japan National Tourist Organization, Aichi Prefectural Government, CASIO SCIENCE PROMOTION FOUNDATION, DAIKO FOUNDATION, Nagoya Convention and Visitors Bureau, The Asahi Glass Foundation, The Kao Foundation For Arts And Sciences, The Murata Science Foundation, The Ogasawara Foundation for the Promotion of Science & Engineering, ASAHI GLASS CO., LTD. Research Center, CENTRAL GLASS CO., LTD., ELECTRIC GLASS INDUSTRY ASSOCIATION OF JAPAN (EGAJ), Hattori Company, Ltd., Hitachi Research Laboratory, Hitachi, Ltd., HOYA CORPORATION, INAX Corporation, ITOCHU CERATECH CORP., Japan Cement Association, KYOCERA Corporation, KYUSHU REFRACTORIES CO., LTD., MINO CERAMIC CO., LTD., Murata Manufacturing Co., Ltd., NGK INSULATORS LTD., NGK SPARK PLUG CO., LTD., NICHIAS Corporation, NIKKO COMPANY, Nippon Electric Glass Co., Ltd., Nippon Sheet Glass Co., Ltd., NORITAKE CO., LIMITED, Tokuyama Corporation, TOTO LTD.

Papers

Ferroelectric and Memory Characteristics of (Pb, La)(Zr, Ti)O₃ Thin Films Crystallized by Hot Isostatic Pressing

Shinichi KOJIMA, Masafumi KOBUNE, Yusuke NISHIOKA, Tetsuo YAZAWA

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Keywords: PLZT, Magnetron sputtering, Hot isostatic pressing, High-pressure crystallization process, Surface flatness, Ferroelectric property

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Abstract

Ferroelectric properties and polarization fatigue characteristics of Pt/(Pb_0.925La_0.075) (Zr_0.4Ti_0.6)_0.981O₃ (PLZT)/PbTiO₃ (PT)/Pt capacitors fabricated by crystallizing amorphous PLZT films at 500°C for 1 h under high pressures of 8.8-176.5 MPa using hot isostatic pressing (HIP) are investigated. The films HIP-treated under 26.1 MPa showed almost complete (001)-orientation and their degree of c-axis orientation, α, reached up to 0.99. The P-E hysteresis loops of films HIP-treated under 8.8-176.5 MPa gradually changed from a rectangular shape with a remanent polarization 2P_r=25.9 μC/cm² and a coercive field 2E_c=76.8 kV/cm to a flat shape with 2P_r=9.8 μC/cm² and 2E_c=54.4 kV/cm with increasing HIP pressure. The pulse-derived switchable polarization (Q_sw) of all the samples HIP-treated under high pressure over 26.1 MPa hardly showed the fatigue degradation up to the switching cycles of 3×10¹⁰.

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