Fabrication of PZT Thick Films on Silicon Wafer by Powder  Electrophoretic Deposition

Ni KANG; Wen GONG; Jing LIU; Jing-Feng LI

doi:10.14852/jcersjsuppl.112.0.S506.0

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue

Session ID : 6

DOI https://doi.org/10.14852/jcersjsuppl.112.0.S506.0

Conference information

Host: The Ceramic Society of Japan

Co-host: Iketani Science and Technology Foundation, International Ceramic Federation, Commemorative Organization for the Japan World Exposition '70, The American Ceramic Society, The Australasian Ceramic Society, The Chinese Ceramic Society, The Korean Ceramic Society, Joint Research Consortium of Synergy Ceramics/Fine Ceramics Research Association, Nanotechnology Researchers Network Center of Japan, The Special Coordination Funds for Promoting Science and Technology, Japan National Tourist Organization, Aichi Prefectural Government, CASIO SCIENCE PROMOTION FOUNDATION, DAIKO FOUNDATION, Nagoya Convention and Visitors Bureau, The Asahi Glass Foundation, The Kao Foundation For Arts And Sciences, The Murata Science Foundation, The Ogasawara Foundation for the Promotion of Science & Engineering, ASAHI GLASS CO., LTD. Research Center, CENTRAL GLASS CO., LTD., ELECTRIC GLASS INDUSTRY ASSOCIATION OF JAPAN (EGAJ), Hattori Company, Ltd., Hitachi Research Laboratory, Hitachi, Ltd., HOYA CORPORATION, INAX Corporation, ITOCHU CERATECH CORP., Japan Cement Association, KYOCERA Corporation, KYUSHU REFRACTORIES CO., LTD., MINO CERAMIC CO., LTD., Murata Manufacturing Co., Ltd., NGK INSULATORS LTD., NGK SPARK PLUG CO., LTD., NICHIAS Corporation, NIKKO COMPANY, Nippon Electric Glass Co., Ltd., Nippon Sheet Glass Co., Ltd., NORITAKE CO., LIMITED, Tokuyama Corporation, TOTO LTD.

Papers

Fabrication of PZT Thick Films on Silicon Wafer by Powder Electrophoretic Deposition

Ni KANG, Wen GONG, Jing LIU, Jing-Feng LI

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Keywords: Electrophoretic deposition (EPD), PZT, Thick films, Sintering

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Abstract

Integration of piezoelectric films on silicon wafer is becoming very important for the applications in microelectromechanical systems (MEMS). Compared with other existing methods, electrophoretic deposition is a promising, simple and cost-effective method for fabrication of piezoelectric ceramic films. In this study, commercial lead zirconate titanate (PZT) powders were deposited onto silicon wafers coated with platinum electrodes by using electrophoretic deposition method in ethanol solution. The deposition behavior was investigated under different applied voltages and deposition duration. The morphologies and microstructures of as-deposited and sintered films were observed by scanning electron microscopy (SEM). Phase development of the PZT thick films was analyzed by X-ray diffraction to optimize the processing parameters.

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