Journal of the Ceramic Society of Japan, Supplement
Online ISSN : 1349-2756
ISSN-L : 1349-2756
Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue
Session ID : 6
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Electrical Properties of YSZ and SrO-Doped YSZ Films Prepared by MOCVD
Teiichi KIMURARyosuke KOGUREHiroshi MASUMOTOTakashi GOTO
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Abstract
Yttria-stabilized zirconia (YSZ) films and SrO-doped YSZ films were prepared by MOCVD, and their electrical properties were investigated. (200) oriented cubic-YSZ films were obtained at 873 to 1024 K. The electric conductivity, dielectric constant and dielectric loss tangent of the YSZ films were almost in agreement with those of YSZ single crystals. Cubic SrO-doped YSZ films were obtained at the composition of 3 to 9 mol%SrO. The electrical conductivity and dielectric loss tangent of SrO-doped YSZ films were decreased with increasing SrO content, and the dielectric constant showed the minimum value of 15 at 10 mol%SrO.
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© 2004 The Ceramic Society of Japan
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