CO Sensing Properties of ZnO-SnO2 Composite Thin Films Prepared by  the Sol-Gel Method

Masashi SHOYAMA; Noritsugu HASHIMOTO

doi:10.14852/jcersjsuppl.112.0.S559.0

Journal of the Ceramic Society of Japan, Supplement 112-1, PacRim5 Special Issue

Session ID : 7

DOI https://doi.org/10.14852/jcersjsuppl.112.0.S559.0

Conference information

Host: The Ceramic Society of Japan

Co-host: Iketani Science and Technology Foundation, International Ceramic Federation, Commemorative Organization for the Japan World Exposition '70, The American Ceramic Society, The Australasian Ceramic Society, The Chinese Ceramic Society, The Korean Ceramic Society, Joint Research Consortium of Synergy Ceramics/Fine Ceramics Research Association, Nanotechnology Researchers Network Center of Japan, The Special Coordination Funds for Promoting Science and Technology, Japan National Tourist Organization, Aichi Prefectural Government, CASIO SCIENCE PROMOTION FOUNDATION, DAIKO FOUNDATION, Nagoya Convention and Visitors Bureau, The Asahi Glass Foundation, The Kao Foundation For Arts And Sciences, The Murata Science Foundation, The Ogasawara Foundation for the Promotion of Science & Engineering, ASAHI GLASS CO., LTD. Research Center, CENTRAL GLASS CO., LTD., ELECTRIC GLASS INDUSTRY ASSOCIATION OF JAPAN (EGAJ), Hattori Company, Ltd., Hitachi Research Laboratory, Hitachi, Ltd., HOYA CORPORATION, INAX Corporation, ITOCHU CERATECH CORP., Japan Cement Association, KYOCERA Corporation, KYUSHU REFRACTORIES CO., LTD., MINO CERAMIC CO., LTD., Murata Manufacturing Co., Ltd., NGK INSULATORS LTD., NGK SPARK PLUG CO., LTD., NICHIAS Corporation, NIKKO COMPANY, Nippon Electric Glass Co., Ltd., Nippon Sheet Glass Co., Ltd., NORITAKE CO., LIMITED, Tokuyama Corporation, TOTO LTD.

Papers

CO Sensing Properties of ZnO-SnO₂ Composite Thin Films Prepared by the Sol-Gel Method

Masashi SHOYAMA, Noritsugu HASHIMOTO

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Keywords: ZnO, SnO₂, Composite, Thin film, CO gas, Selectivity

CONFERENCE PROCEEDINGS FREE ACCESS

Details

Abstract

ZnO-SnO₂ composite thin film was prepared by the sol-gel method using a multi component precursor solution. The CO sensing characteristics of ZnO-SnO₂ composite thin film were examined. ZnO addition to the SnO₂ thin film was very effective to improve the CO sensitivity and the selectivity at the operating temperature range of 200°C to 500°C. The CO sensitivity of the ZnO (50 mol%)-SnO₂ thin film increased as operating temperature decreased, and it showed maximum sensitivity of 587 at 200°C.

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