Abstract
Improvement of corrosion resistance of a thin cobalt film by the surface treatment using 1, 2-Bis(triethoxysilyl) ethane (BTSE) was evaluated. A BTSE layer was formed on cobalt oxide by immersing the cobalt film in a BTSE solution including water and hydrogen peroxide which improved corrosion resistance of the film significantly. When hydrogen peroxide was absent in the BTSE solution, the BTSE layer was not formed. The corrosion resistance was improved with increasing the pH of BTSE solution containing hydrogen peroxide. These behaviors could be explained by the hard and soft acid-base (HSAB) principle.
