Zairyo-to-Kankyo
Online ISSN : 1881-9664
Print ISSN : 0917-0480
ISSN-L : 0917-0480
Ellipsometry
Toshiaki Ohtsuka
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1993 Volume 42 Issue 10 Pages 663-672

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Abstract

Ellipsometry is one of optical methods for characterization of solid surfaces by using polarized-light reflection. It can determine the optical properties of surfaces and surface layers. Particularly it has a high sensitivity and reliability of the thickness measurement of the surface layers or films. This article describes on the ellipsometry the principle, apparatus and the application to corrosion study.

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© Japan Society of Corrosion Engineering
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