Zairyo-to-Kankyo
Online ISSN : 1881-9664
Print ISSN : 0917-0480
Secondary Ion Mass Spectrometry (SIMS)
Masahiro KudoSusumu Nagayama
Author information
JOURNALS FREE ACCESS

1993 Volume 42 Issue 5 Pages 312-321

Details
Abstract

Secondary Ion Mass Spectrometry (SIMS) has been regarded as one of the most sensitive techniques for the three dimensional surface quantitative analysis. In this review article, general explanation is presented in concern with the principle of the measurements and data interpretations. Special emphases are laid on the quantification of the technique and the surface sensitivity when used as static SIMS. In addition, some examples are given for practical problem solving, especially for the evaluation of the various surface treatments of semiconductors, alloys and organic materials.

Information related to the author
© Japan Society of Corrosion Engineering
Previous article Next article
feedback
Top