Zairyo-to-Kankyo
Online ISSN : 1881-9664
Print ISSN : 0917-0480
ISSN-L : 0917-0480
Evaluation of Pinhole Defect Density in TiN Thin Films
Katsuhisa Sugimoto
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1995 Volume 44 Issue 4 Pages 259-261

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© Japan Society of Corrosion Engineering
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