Atomic Level Analysis of Surfaces by a Scanning Atom Probe (SAP)

Abstract

The structure and unique feature of a scanning atom probe (SAP) are described. The atomic level mass analysis by the SAP is demonstrated by analyzing the diamonds formed by the chemical vapor deposition (CVD), graphites, vitreous carbon and silicon microtips fabricated by lithographic process. The analysis revealed that the CVD diamonds contain a large amount of hydrogen. Furthermore, a significant difference between the mass spectra of the diamonds, graphite and vitreous carbon is noticed. The study also shed light on the oxygen, carbon and fluorine diffusion into the silicon tips immersed in hydrofluoric acid. Applicability of the SAP for the study of corrosion process is discussed.