Analysis of Surfaces and Thin Films by UV-Visible Reflectance Spectroscopy

Abstract

This review gives an overview of the principles and experimental methods of UV-visible reflectance spectroscopy including potential-modulated reflectance spectroscopy (PMRS) and real-time spectroscopic ellipsometry (RTSE). The capabilities of in-situ, non-invasive, surface-sensitive analysis are demonstrated for the composition determination of passive films using PMRS and for the real-time monitoring of thin film growth and dissolution processes using RTSE.