Medium Synchrotron Radiation Facility, NewSUBARU and Its Industrial Applications

Abstract

Medium scale synchrotron radiation facility, NewSUBARU (1.5GeV), whose energy levels are much less than SPring-8 (8GeV), is introduced including storage ring (circumference is 119m) and several beamlines. Synchrotron radiation light between soft X-ray and ultraviolet light is NewSUBARU's favorite one. Examples for industry applications performed by beamlines of NewSUBARU, lithography, new materials production and so on, are also shown