抄録
Cothordoluminescence (CL) detection system was built up for a transmission electron microscope with scanning units, which enable us to take high-resolution CL images of crystal defects together with crystallographic information. Luminescence or non-luminescence centers localized at dislocations in III-V compound semiconductors, diamond and magnesium oxide were observed using this system. Their natures were studied through the analyses of the TEM and monochromatic CL images and spectral information of the CL light.
