抄録
The effect of surface steps on RHEED is described on the basis of calculated intensities based on multiple scattering theory from periodic arrays of steps. The results show that multiple scattering theory is necessary to interpret intensities even qualitatively. For example, 1) the intensities are quite different from those by single scattering theory, and 2) the intensities strongly depend on the incident beam azimuth to the step edges. In application, the intensity variations from stepped surfaces as a function of the number of atoms in the topmost layer are used to analyse RHEED intensity oscillations during molecular beam epitaxy.
